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Book Cover
Book
Author Franssila, Sami

Title Introduction to microfabrication / Sami Franssila.

Imprint Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010

Copies

Location Call No. Status
 Female Library  TK7875 F73 2010    Available
 Female Library  TK7875 F73 2010 c.2  Available
 Male Library  TK7875 F73 2010    Available
 Male Library  TK7875 F73 2010 c.2  Available
Edition 2nd ed
Description 518 p. : ill. ; 25 cm.
Note Includes index.
Subject Microfabrication
Microelectromechanical systems
Electronic apparatus and appliances
ISBN 9780470749838 (cloth)
0470749830 (cloth)
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