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Title Hazard assessment and control technology in semiconductor manufacturing / [sponsored by] American Conference of Governmental Industrial Hygienists.

Imprint Chelsea, Mich. : Lewis Publishers, c1989.

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Description vii, 322 p. : ill. ; 24 cm.
Series Industrial hygiene science series
Note Papers presented at a symposium sponsored by the American Conference of Governmental Industrial Hygienists and others and held in Cincinnati, Ohio, Oct. 20-22, 1987.
Bibliography Includes bibliographies and index.
Subject Semiconductor industry -- Safety measures -- Congresses
Added Author American Conference of Governmental Industrial Hygienists
ISBN 0873711327