My Library

LEADER 00000nam a2200313 a 4500 
001    u3962 
001    3455 
003    SIRSI 
005    20030401204200.0 
008    881213s1989    miua     b    101 0 eng   
010    88037742 
020    0873711327 
035    ocm18960694 
040    DLC|cDLC|dWQM|dOCL 
049    UAUA|bNAEM 
050 0  TK7871.85|b.H389 1989 
245 00 Hazard assessment and control technology in semiconductor 
       manufacturing /|c[sponsored by] American Conference of 
       Governmental Industrial Hygienists. 
260    Chelsea, Mich. :|bLewis Publishers,|cc1989. 
300    vii, 322 p. :|bill. ;|c24 cm. 
440  0 Industrial hygiene science series 
500    Papers presented at a symposium sponsored by the American 
       Conference of Governmental Industrial Hygienists and 
       others and held in Cincinnati, Ohio, Oct. 20-22, 1987. 
504    Includes bibliographies and index. 
650  0 Semiconductor industry|xSafety measures|vCongresses 
710 2  American Conference of Governmental Industrial Hygienists 
994    92|bUAAUS